Competence Center for High-Resolution Superconducting Sensors (HSS)

The Competence Center for High-Resolution Superconducting Sensors (HSS) is a worldwide unique facility for the development and (batch) fabrication of superconducting particle and radiation detectors with extremely high energy and time resolution, currently being established at KIT. The facility is operated in collaboration with the Institute for Data Processing and Electronics (IPE), the Institute of Micro- and Nanoelectronic Systems (IMS) and the partner institution Kirchhoff Institute for Physics at Heidelberg University.

The goal of the center is to significantly increase production capacity for superconducting sensors, thereby enabling the development of large-scale experiments based on superconducting quantum sensors. The fabrication focuses on calorimetric low temperature particle detectors and superconducting electronics based on Josephson tunnel junctions, such as dc-SQUIDs or microwave SQUID multiplexers. To realize batch fabrication of these sensors, the equipment is designed for using 6-inch substrates and automated process control.

Overview of Production Machinery

In the first stage of HSS, the production machinery consists of the following equipment:

UHV multi-chamber deposition system for the deposition of various materials
ICP-PECVD deposition system for the deposition of insulators
Fluorine-based ICP-RIE etching system for metal etching
Fluorine-based ICP-RIE etching system for deep silicon etching and insulator etching
Chlorine-based ICP-RIE etching system for metal etching
Direct-writing laser lithography system
Multiple wet benches with spin coater, spin developer, and hot plate
Electroplating system for high-purity gold layers

HSS at the Institute of Micro- and Nanoelectronic Systems (IMS)

Floor plan of the technology department at IMS

The final location for HSS is the Karlsuhe Center for Optics and Photonics (KCOP). The HSS facility within KCOP has been optimally designed based on the fabrication systems and user requirements to ensure efficient and effective utilization of all machines. Since KCOP is expected to be completed in the first half of 2026, the HSS production machinery is currently being set up at its initial temporary installation site, the Institute of Micro- and Nanoelectronic Systems (IMS). A significant amount of the equipment has already been installed and is operational at KIT.

In addition to purchasing the individual fabrication systems, all necessary manufacturing processes are currently being developed and optimized. Once the production machinery is relocated and the subsequent installation phase is completed, HSS will be immediately operational, as no major adjustments are expected for the already optimized processes.